Technical Information Magazine 202102-04 Introduction of New RBS Equipment
The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.
**Abstract** In recent years, with the high integration of various devices, evaluation in localized areas has become extremely important for product development and functional enhancement. The newly introduced RBS device at the Toray Research Center is equipped with a microbeam line capable of converging high-speed ion beams to a minimum of 1 μm in diameter, enabling precise composition and density analysis in small areas. Additionally, the increase in incident ion species and the acceleration of incident ions have significantly improved the sensitivity for light elements and the mass resolution for heavy elements compared to conventional methods. This paper introduces these new functions along with case studies. **Table of Contents** 1. Introduction 2. Composition Analysis of Small Areas Using μRBS 3. High-Sensitivity Measurement of Light Elements Using NRA 4. Improvement of Mass Resolution for Heavy Elements 5. Conclusion
- Company：東レリサーチセンター
- Price：Less than 10,000 yen
